Industry: Semiconductor manufacturing | Reference sites: CETC 26th Research Institute, Daqing Semiconductor | Configuration: IGBT DC power supply 150 A
Kulun Electric’s 150 A IGBT DC power supply is applied to semiconductor process equipment at CETC 26th Research Institute and Daqing Semiconductor, providing stable DC output for process sections. The solution targets semiconductor applications with high requirements for supply stability, output accuracy, protection capability and continuous operation reliability, and can be configured for voltage, current, control interfaces and protection logic according to equipment conditions.
1. Project Overview
Industry | Semiconductor manufacturing, semiconductor process equipment |
Reference sites | CETC 26th Research Institute, Daqing Semiconductor |
Site equipment | Semiconductor process equipment, diffusion furnaces and related process sections |
Product | IGBT DC power supply, 150 A |
Main purpose | DC power supply and process power package for semiconductor process equipment |
Core requirements | CV/CC stability, stable response, comprehensive protection |
Solution positioning | Industrial DC power supply solution for semiconductor process equipment |
2. Application Background
Front-end semiconductor production involves diffusion, oxidation, annealing, alloying, sintering and other process equipment, with high requirements for supply output stability, control accuracy and long-term reliability. Output fluctuation, inadequate protection or unstable communication control in the power system can affect continuous equipment operation and production rhythm.
The projects at CETC 26th Research Institute and Daqing Semiconductor required stable, reliable DC power supplies for semiconductor process equipment. Based on site equipment conditions, Kulun adopted the 150 A IGBT DC power supply solution to provide a controllable, stable and integration-friendly DC power unit for the process sections.
3. Requirements & Technical Challenges
For this application, the heating and power control system had to address the following points:
- High output stability requirement: Process equipment needs stable DC output during operation, minimizing the effect of current fluctuation on the process.
- High control accuracy requirement: Current, voltage and operating status must be finely controlled according to equipment process conditions.
- Long continuous operation: Semiconductor process equipment typically runs continuously, so the supply must adapt to long-cycle operation.
- Comprehensive protection logic: Overcurrent, overvoltage, overheating, phase loss and short-circuit protection are required to reduce site operating risk.
- Integration convenience: The supply should connect easily to equipment control systems, supporting commissioning, monitoring and maintenance management.
4. KULUN Solution
Kulun Electric configured a 150 A IGBT DC power supply for the semiconductor process equipment, used for site DC power, process power packaging and equipment electrical system integration.
The solution uses IGBT power electronic control, featuring fast output regulation response, strong CV/CC capability, comprehensive protection and high integration density. Control interfaces, communication, cabinet structure and cooling can be configured to the needs of semiconductor site equipment.
Key Features of the Solution
- IGBT DC output. Suits DC power scenarios of semiconductor process equipment, providing stable, adjustable DC output.
- 150 A configuration. Covers DC current requirements of small and medium-power semiconductor process equipment and related sections.
- CV/CC control. Voltage and current can be regulated per process requirements, improving equipment operating stability.
- Comprehensive protection. Overcurrent, overvoltage, overheating and short-circuit protection options suit long-term industrial site operation.
- Easy system integration. Works with equipment control systems, PLC or host computers for site automation control.
- Adapted to semiconductor sites. Custom configuration around site space, cooling, wiring, maintenance and operating environment.
5. Reference Projects
The 150 A IGBT DC power supply solution has been used in semiconductor process equipment projects at CETC 26th Research Institute and Daqing Semiconductor, providing stable DC power and process power packaging.
CETC 26th Research Institute | DC power supply for semiconductor process equipment
In this project, Kulun configured the 150 A IGBT DC power supply around the requirements for stable DC output and equipment integration, serving the site process power package.
Daqing Semiconductor | DC power supply at a semiconductor production site
In this project, the IGBT DC power supply serves semiconductor production equipment, providing controllable DC output that meets equipment operation, protection and maintenance management needs.
6. Project Site
150 A IGBT DC power supply applied in projects at CETC 26th Research Institute and Daqing Semiconductor
7. Results
After the 150 A IGBT DC power supply was applied to the semiconductor process equipment, the sites gained stable DC output, comprehensive protection and an integration-friendly power unit, meeting semiconductor production requirements for industrial supply stability and reliability.
- Meets stable DC power requirements of semiconductor process equipment;
- 150 A rating fits site equipment current configuration;
- IGBT control helps improve output regulation stability;
- Comprehensive protection suits continuous operation at semiconductor sites;
- Easy electrical integration with equipment control systems and convenient site maintenance.
Note: Actual performance varies with equipment type, process conditions, input supply, output voltage, current range, control mode and site environment.
8. Applicable Scenarios
IGBT DC power supplies can be selected and configured by voltage, current, power, control mode and operating environment of semiconductor site equipment, and suit a range of industrial DC power applications.
- DC power for semiconductor process equipment
- Power packages for diffusion, oxidation, annealing, alloying and sintering equipment
- Auxiliary process power for semiconductor production lines
- Industrial DC power scenarios requiring CV/CC output
- DC power projects requiring PLC, host computer or equipment control system integration
9. FAQ
Can the 150 A IGBT DC power supply be used for semiconductor process equipment?
Yes. It can be used for DC power and process power packaging of semiconductor process equipment; the exact fit is confirmed against equipment voltage, current, power and control mode.
Why do semiconductor tools need a stable DC power supply?
Semiconductor process equipment has high operating stability requirements; stable DC output helps reduce process fluctuation and keeps equipment running continuously.
What are the advantages of an IGBT DC supply over a conventional rectifier supply?
IGBT DC supplies typically offer faster output regulation response, stronger CV/CC capability, higher integration and more comprehensive protection, suiting industrial equipment with high control stability requirements.
What parameters are needed to specify a DC supply for semiconductor applications?
Typically equipment purpose, input supply, output voltage, output current, power range, load characteristics, control interface, communication, protection requirements and site environment.
Can Kulun customize IGBT DC power supplies for semiconductor sites?
Yes. Kulun Electric can configure IGBT DC power supplies and related electrical control solutions according to the voltage, current, power, control mode and installation environment of semiconductor process equipment.
